Micromachined Membrane Deformable Mirrors (MMDM) PDF Print E-mail

Micromachined membrane deformable mirrors with apertures in the range of 10 to 50 mm, represent a high-quality affordable solution for the correction of dynamic wavefront deformations in laser systems and telescopes:

  • MMDM are small and light, especially compared to continuous faceplate piezoelectric mirrors;
  • Negligible power consumption;
  • High optical quality, better than 400nm rms over the whole - aperture;
  • Very smooth surface: the scattering is negligible;
  • Fast (1 kHz) response;
  • Large correction range - up to 25um in total wavefront deformation;
  • These mirrors can be coated with metal and metal-dielectric coatings: - to be used in lasers at power levels of up to 600 W CW;
  • Zero hysteresis;
  • Negligible parameter drift.

 

37-ch 15-mm "OKO Mirror"

OKO mirrorThis is probably the most popular deformable mirror ever made. In production since 1997, hundreds of these devices are used by scientists and engineers in all kinds of adaptive optics project, including laser beam control, real time atmospheric correction, ophthalmology, intracavity laser control, communications, holographic memory, optical fiber switching, etc. Properties of these mirrors are described in numerous scientific publications. Available with Al and gold coatings as standard, custom orders for protected silver and multilayer laser coatings available. The deflection range measured in the centre of the membrane is about 25 fringes at 633nm. In addition to standard silicon nitride-based mirrors, we produce mirrors with thicker polysilicon membrane, featuring higher reliability and snap-on protection.