HoliSTEP
Since 2024, OKO participates in the EU-funded project HoliStep, aimed at the development of high-resolution holographic stepper for high-resolution projection of 2D and 3D lithographic patterns in microelectronics and microfabrication.
- In this framework, OKO will develop and deliver:
- the optical alignment sensor, providing 25 nm overlay at 345 nm wavelength;
- the adaptive optical system, providing λ/20 wavefront precision and stability at 345 nm wavelength.
Flexible Optical B.V. (OKO Tech) is a small Dutch business operating in the field of research and application-oriented development of laser and high resolution imaging adaptive optics. From its foundation in 1997, OKO offers high-quality deformable mirrors featuring extremely smooth surface with HR metal and dielectric coatings suitable for most demanding imaging and high power laser applications.
79-ch 15 mm MMDM with optimised actuator geometry
OKO introduces a 79-channel 15 mm membrane deformable mirror MI4-v1. The device features novel geometry of actuators, specially designed for the best approximation of the low-order Zernike polynomials in the working aperture of 8.7 mm.
The mirror is commercialision of our research and development activities funded by ECSEL in terms of MADEin4 project.
MADEin4
Flexible Optical B.V. is a member of MADEin4 project, a consortium that develops next generation metrology tools, machine learning methods and applications in support of Industry 4.0 high-volume manufacturing in the semiconductor and automotive manufacturing industries.
For more information, please visit the project web site.
Simulation of OKO DMs in Zemax
OKO introduces Zemax DLLs to facilitate realistic simulation of optical systems that include deformable mirrors produced by OKO. There are two separate libraries for two mirror classes: one is for Micromachined Deformable Mirrors (MMDM) and the other is for Piezoactuated Deformable Mirors (PDM). The libraries are implemented in the form of User Defined Surface (UDS) DLLs for Zemax and can be used in any Zemax model and suitable for every way of analysis. We provide those UDS to facilitate design by customers of their systems utilizing our deformable mirrors. Thus it is possible to evaluate parameters of a particular model of deformable mirror and assess it applicability to some particular application and setup. Also it makes easier to choose between several available mirror models. The configuration data is provided for all round MMDM and PDM models ever produced by Flexible Optical B.V. Detailed User's manuals are available for the MMDM version and for the PDM version. The software is developed by Flexible Optical B.V. in collaboration with Fraunhofer Institute for Laser Technology ILT/ Chair for Technology of Optical Systems TOS RWTH Aachen University. Part of the development was carried out within the framework of UltraSURFACE European project (H2020-ICT-2015, Project no. 687222).
96-ch DM powered and controlled by a single USB link
OKO introduces a 96-channel 25.4 mm membrane deformable mirror with embedded control electronics. The device has sturdy compact enclosure with dimensions of 90 x 90 x 43 mm (volume is about 0.35 l), it is powered and controlled by a single USB link. The mirror features full deflection of 19 μm and maximum update rate of 2 kHz. With the development of this DM, OKO makes possible to build a complete AO system that does not require any external power supply, as all the power for the WF sensor and the DM is provided through available USB ports of the control computer, with total power consumption for a complete 96-ch AO system not exceeding 5 W. Please contact us if interested by email This email address is being protected from spambots. You need JavaScript enabled to view it. or using the contact form on the left side.
Zernike Commander: simulation and visualization
Zernike Commander is a simple yet useful software tool suitable for education, real-time aberration visualization as well as for generation of test Hartmann image patterns. The software accepts an wavefront aberration described in the form of Zernike coefficients as well as parameters of Schack-Hartmann wavefront sensor as its input and produces the following graphical results: 3D representation of wavefront phase, interference pattern, far-field intensity distribution, Hartmann pattern, overview of Zernike modes.