HoliSTEP

Since 2024, OKO participates in the EU-funded project HoliStep, aimed at the development of high-resolution holographic stepper for high-resolution projection of 2D and 3D lithographic patterns in microelectronics and microfabrication.

In this framework, OKO will develop and deliver:
• the optical alignment sensor, providing 25 nm overlay at 345 nm wavelength;
• the adaptive optical system, providing λ/20 wavefront precision and stability at 345 nm wavelength.